PCT/US2012/059967
APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE
Details for PCT/US2012/059967
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Abstract
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PCT Patent application PCT/US2012/059967 was filed on October 12, 2012 by 1366 TECHNOLOGIES INC.. The title of this PCT Patent Application is "APPARATUS AND PROCESS FOR DEPOSITING A THIN LAYER OF RESIST ON A SUBSTRATE" and the patent specification was published as WO/2013/056059 on April 18, 2013.
The earliest priority date for the patent application is October 12, 2011 and therefore the 30 month national phase deadline for PCT/US/2012/059967 is April 12, 2014 and the 31 month national phase deadline for PCT/US/2012/059967 is May 12, 2014
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