PCT/NL2012/050270
LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, A METHOD FOR OPERATING A LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER AND A SUBSTRATE FOR USE IN SUCH A LITHOGRAPHY SYSTEM
Details for PCT/NL2012/050270
COUWELEERS, Godefridus, Cornelius, Antonius
PLANDSOEN, Laurens
VERBURG, Cor
VERGEER, Niels
DE BOER, Guido
US61/486,165 filed on May 13, 2011
US61/486,167 filed on May 13, 2011
US61/491,867 filed on May 31, 2011
US61/491,862 filed on May 31, 2011
US61/491,866 filed on May 31, 2011
Dates
Deadlines
Abstract
Info
PCT Patent application PCT/NL2012/050270 was filed on April 23, 2012 by MAPPER LITHOGRAPHY IP B.V.; COUWELEERS, Godefridus, Cornelius, Antonius; PLANDSOEN, Laurens; VERBURG, Cor; VERGEER, Niels; DE BOER, Guido. The title of this PCT Patent Application is "LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, A METHOD FOR OPERATING A LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER AND A SUBSTRATE FOR USE IN SUCH A LITHOGRAPHY SYSTEM" and the patent specification was published as WO/2012/144903 on October 26, 2012.
The earliest priority date for the patent application is April 22, 2011 and therefore the 30 month national phase deadline for PCT/NL/2012/050270 is October 22, 2013 and the 31 month national phase deadline for PCT/NL/2012/050270 is November 22, 2013
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