PCT/NL2012/050271
POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK
Details for PCT/NL2012/050271
VERGEER, Niels
DE BOER, Guido
US61/491,862 filed on May 31, 2011
Dates
Deadlines
Abstract
Info
PCT Patent application PCT/NL2012/050271 was filed on April 23, 2012 by MAPPER LITHOGRAPHY IP B.V.; VERGEER, Niels; DE BOER, Guido. The title of this PCT Patent Application is "POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK" and the patent specification was published as WO/2012/144904 on October 26, 2012.
The earliest priority date for the patent application is April 22, 2011 and therefore the 30 month national phase deadline for PCT/NL/2012/050271 is October 22, 2013 and the 31 month national phase deadline for PCT/NL/2012/050271 is November 22, 2013
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