VAPOR DEPOSITION REACTOR SYSTEM
Details for PCT/US2011/028546
HEGEDUS, Andreas, G.
PCT Patent application PCT/US2011/028546 was filed on March 15, 2011 by ALTA DEVICES INC.; HE, Gang; HIGASHI, Gregg; SORABJI, Khurshed; HAMAMJY, Roger; HEGEDUS, Andreas, G.. The title of this PCT Patent Application is "VAPOR DEPOSITION REACTOR SYSTEM" and the patent specification was published as WO/2011/116009 on September 22, 2011.
The earliest priority date for the patent application is March 16, 2010 and therefore the 30 month national phase deadline for PCT/US/2011/028546 is September 16, 2012 and the 31 month national phase deadline for PCT/US/2011/028546 is October 16, 2012